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Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices 1st ed. 2023 Edition
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Product details
| Management number | 220514660 | Release Date | 2026/05/03 | List Price | $28.78 | Model Number | 220514660 | ||
|---|---|---|---|---|---|---|---|---|---|
| Category | |||||||||
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view. Read more
| ISBN10 | 365841040X |
|---|---|
| ISBN13 | 978-3658410407 |
| Edition | 1st ed. 2023 |
| Language | English |
| Publisher | Springer Vieweg |
| Dimensions | 6.75 x 0.75 x 9.75 inches |
| Item Weight | 7.6 ounces |
| Print length | 275 pages |
| Publication date | August 3, 2023 |
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